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Title:
OPTICAL CONDENSER SYSTEM, OPTICAL ILLUMINATION SYSTEM PROVIDED WITH THE SAME, AND EXPOSURE SYSTEM
Document Type and Number:
Japanese Patent JP2002246308
Kind Code:
A
Abstract:

To provide an optical condenser system that can secure required optical characteristics using a simple constitution composed of a small number of lenses.

This optical condenser system is constituted, so that its front- side focal plane and first surface (8) coincide with each other and its rear-side focal plane and second surface (10) coincide with each other and condenses and guides the light from the first surface (8) to the second surface (10). This system is provided with a first lens group G1, containing a negative lens the concave surface of which is directed toward the first surface (8), a second lens group G2 containing a positive lens, and a third lens group G3, all of which are positioned in this order from the first surface (8) side. The first lens group G1 has at least one lens surface formed into an aspherical surface.


Inventors:
SUENAGA YUTAKA
HIRAGA KOICHI
KUMAZAWA MASAHITO
Application Number:
JP2001376974A
Publication Date:
August 30, 2002
Filing Date:
December 11, 2001
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B19/00; G02B13/00; G02B13/18; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G02B13/00; G02B13/18; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Takao Yamaguchi