Title:
PIEZOELECTRIC ELEMENT MANUFACTURING METHOD, PIEZOELECTRIC ELEMENT, LIQUID JET HEAD, LIQUID JET APPARATUS, AND ULTRASONIC DEVICE
Document Type and Number:
Japanese Patent JP2015035516
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To work a diaphragm to have a desired thickness with high reproducibility and to provide a piezoelectric element having stable characteristics by suppressing variations in diaphragm film pressure.SOLUTION: A piezoelectric element manufacturing method includes: a first precursor application step for applying a first precursor 11a to a substrate 1; a first crystal layer formation step for forming a first crystal layer 11A by crystallizing the first precursor; a second precursor application step for applying a second precursor 11b onto the first crystal layer 11A; a recessed part formation step for forming a recessed part 14 in a part of the second precursor 11b through wet etching; a second crystal layer formation step for forming a second crystal layer 11B by crystallizing the second precursor 11b; a first electrode formation step for forming a first electrode 20 in the recessed part 14; a piezoelectric material layer formation step for forming a piezoelectric material layer 30 on the first electrode 20; and a second electrode formation step for forming a second electrode 40 on the piezoelectric material layer 30.
Inventors:
NAKAYAMA MASAO
Application Number:
JP2013166005A
Publication Date:
February 19, 2015
Filing Date:
August 09, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/29; B41J2/16; H01L41/047; H01L41/09; H01L41/332; H04R17/00; H04R31/00
Attorney, Agent or Firm:
Masaaki Kamiyanagi
Kazuhiko Miyasaka
Kazuaki Watanabe
Kazuhiko Miyasaka
Kazuaki Watanabe