PIEZOELECTRIC THIN FILM LAMINATED BODY

Title:

PIEZOELECTRIC THIN FILM LAMINATED BODY

Document Type and Number:

Japanese Patent JP2023058089

Kind Code:

A

Abstract:

To improve piezoelectric characteristics of a piezoelectric thin film laminated body comprising a piezoelectric thin film composed of an alkali niobate based piezoelectric material.SOLUTION: A piezoelectric thin film laminated body 10 includes: a substrate 11; a lower electrode 14 laminated above the substrate 11; and a piezoelectric thin film 16 composed of an alkali niobate based piezoelectric material laminated above the lower electrode 14. The piezoelectric thin film laminated body 10 is provided with a conductive layer 15 made of a material having a negative thermal expansion coefficient between the piezoelectric thin film 16 and the substrate 11.SELECTED DRAWING: Figure 1

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Inventors:

HANAWA YUICHIRO
ARAKAWA RYUICHI
ITO SHINSUKE
KASASHIMA TAKASHI

Application Number:

JP2021167850A

Publication Date:

April 25, 2023

Filing Date:

October 13, 2021

Export Citation:

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Assignee:

NGK SPARK PLUG CO

International Classes:

H10N30/079; H10N30/03; H10N30/853

Attorney, Agent or Firm:

Patent Attorney Corporation Grund Patent Office

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