Title:
POLISHING METHOD AND POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2006263853
Kind Code:
A
Abstract:
To provide a polishing method and a polishing device, positioning all carriers or all workpieces in designated fixed positions at the polishing end of polishing time corresponding to a desired polishing amount.
In this polishing method, a plurality of carriers 7 holding a plurality of workpieces 6 are rotated and revolved by a sun gear 9 and an internal gear 8 to polish all of the workpieces 6 collectively. The sun gear 9 is rotated and moved by a predetermined amount before the start of polishing so that at the end of polishing, all carriers 7 or all the workpieces are positioned at designated fixed positions, and after that polishing is started.
Inventors:
IIHAMA TAKAO
IBARAKI MASAYUKI
KOJIMA KAZUNORI
IBARAKI MASAYUKI
KOJIMA KAZUNORI
Application Number:
JP2005084792A
Publication Date:
October 05, 2006
Filing Date:
March 23, 2005
Export Citation:
Assignee:
TAIYO KK
International Classes:
B24B37/08
Attorney, Agent or Firm:
Mamoru Ushiki
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