ポジ型フォトレジスト組成物

Title:

ポジ型フォトレジスト組成物

Document Type and Number:

Japanese Patent JP4181760

Kind Code:

B2

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Inventors:

Kenichiro Sato
Moto Nakao

Application Number:

JP2001169802A

Publication Date:

November 19, 2008

Filing Date:

June 05, 2001

Export Citation:

Assignee:

FUJIFILM Corporation

International Classes:

G03F7/039; C08F232/08; G03F7/004; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Takeshi Takamatsu
Kiyozumi Yazawa

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