Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023154134
Kind Code:
A
Abstract:
To reprocess a workpiece without reducing processing efficiency even when an abnormality occurs during processing.SOLUTION: A processing device includes a chuck table that holds a workpiece having streets that intersect with each other on a holding surface, a processing unit that processes the workpiece held on the chuck table along the streets, and a control unit. When processing is interrupted with an unprocessed area left while causing the processing unit to process the workpiece from one end of the street to the other end, the control unit rotates the chuck table 180 degrees and causes the processing unit to process the unprocessed area of the workpiece from the other end of the street.SELECTED DRAWING: Figure 1
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Inventors:
OKAMURA TAKU
Application Number:
JP2022063225A
Publication Date:
October 19, 2023
Filing Date:
April 06, 2022
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23K26/00; B23K26/364; B24B27/06; B24B49/10; B24B49/12; B24B49/16; H01L21/677
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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