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Title:
REFLECTION IMAGING ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JP2006156134
Kind Code:
A
Abstract:

To increase the contrast of a mirror electron microscope.

A separator 4 for separating an irradiated electron beam 101 and a reflected electron beam 102 of the mirror electron microscope is positioned between an objective lens 5 and an intermediate lens 8, and a restriction diaphragm 14 is positioned in a position 43 where the intermediate lens 8 projects an electron beam diffraction image of the reflected electron beam 102 formed in a focus position 41 of the objective lens 5. The restriction of the reflected electron beam using the restriction diaphragm 14 improves the contrast of a mirror electron microscope image.


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Inventors:
MURAKOSHI HISAYA
TODOKORO HIDEO
HASEGAWA MASAKI
Application Number:
JP2004345113A
Publication Date:
June 15, 2006
Filing Date:
November 30, 2004
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01J37/29
Domestic Patent References:
JPH09167591A1997-06-24
JP2004014485A2004-01-15
JP2001076665A2001-03-23
JP2004192906A2004-07-08
JPH11108864A1999-04-23
Attorney, Agent or Firm:
Yasuo Sakuta
Manabu Inoue



 
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