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Title:
レジスト組成物の酸発生剤用の塩
Document Type and Number:
Japanese Patent JP5747450
Kind Code:
B2
Abstract:
A salt having a group represented by the formula (I): -T  (I) wherein T represents a C3-C36 alicyclic hydrocarbon group in which at least two methylene groups are replaced by —O— or —S— and which can have one or more substituents.

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Inventors:
Koji Ichikawa
Masako Sugihara
Masahiko Shimada
Application Number:
JP2010131728A
Publication Date:
July 15, 2015
Filing Date:
June 09, 2010
Export Citation:
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Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07D327/06; C07C309/17; C07C381/12; C09K3/00; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
JP2004139063A
JP2002116546A
JP2002156750A
JP2008127367A
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto



 
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