Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SCANNING PROXIMITY FIELD OPTICAL MICROSCOPE
Document Type and Number:
Japanese Patent JPH10293133
Kind Code:
A
Abstract:

To provide a proximity field optical microscope which is constituted to alternatively switch a plurality of probes to scanning states by means of a switching mechanism.

A probe 5 is arranged with its front end at a prescribed interval from a sample 1 and can scan the sample 1 when a sample state 2 is moved by means of a scanner 4 for scanning. The light emitted from a light source 3 and passes through the sample 1 is fetched to the probe 5 near the surface of the sample 1, detected by means of a photodetector 8 through a condensing optical system 6 and a pinhole 7, and displayed on a monitor 11 as a scanning proximity field optical microscope image after the light is subjected to signal processing at a computer 10. A plurality of probes 5 is attached to the sliding member 15b of a switching mechanism 15 through attachments 16 and, when the member 15b is moved through a controller 9, a prescribed probe 5 is switched to a scanning state.


Inventors:
ONADA TAKESHI
Application Number:
JP10184197A
Publication Date:
November 04, 1998
Filing Date:
April 18, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01N37/00; G01Q30/04; G01B11/30; G01Q30/20; G01Q60/18; G01Q60/22; G01Q70/06; G01Q70/10; (IPC1-7): G01N37/00; G01B11/30
Attorney, Agent or Firm:
Yasushi Shinohara