Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SECONDARY ELECTRON DETECTOR
Document Type and Number:
Japanese Patent JPH08212962
Kind Code:
A
Abstract:

PURPOSE: To provide a secondary electron detector which can selectively detect a specific energy secondary electron.

CONSTITUTION: Of a secondary electron(e), a relatively high energy electron e2, passing through the third electrode 7 of mesh shape applied with -200V voltage, is absorbed by being made incident to the forth electrode 11 applied with positive high voltage. On the other hand, a relatively low energy electron e1 is reflected by a negative electric field of the third electrode 7 of mesh shape, to pass through the second electrode 5 applied with +100V voltage, to be made incident to a scintillator 13. The scintillator 13 emits light in accordance with a quantity of the incident secondary electron e1. Emitting light in this scintillator 13 is advanced into a photoelectric transfer surface 16 of a photomultiplier tube 15 through a glass member 12 and an optical fiber 14 and converted into an electric signal.


Inventors:
OYAMA JUNICHI
Application Number:
JP1662395A
Publication Date:
August 20, 1996
Filing Date:
February 03, 1995
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
JEOL LTD
International Classes:
G01T1/28; H01J37/244; H01J37/28; (IPC1-7): H01J37/244; G01T1/28; H01J37/28
Attorney, Agent or Firm:
Fujishima Ijima (1 outside)