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Patent Searching and Data


Title:
SUBSTRATE COATING DEVICE AND SUBSTRATE COATING METHOD
Document Type and Number:
Japanese Patent JP2004209313
Kind Code:
A
Abstract:

To provide a substrate coating device capable of forming a coating film having uniform film thickness on the substrate, and a substrate coating method.

After a nozzle 21 is moved and positioned at a coating film formation position, a coating liquid 57 for liquid application from a supply source 56 is delivered to a nozzle delivery part 211 and a coating film formation block 51 is simultaneously moved in a longitudinal direction Y of the nozzle 21. Thereby, the coating film 58 is formed by the coating liquid 57 for liquid application delivered from fine nozzles 531, 541 over a whole area in the longitudinal direction Y at a tip end 211 of the nozzle 21. After the nozzle 21 is moved and positioned at a coating starting position, the nozzle 21 is descended and the coating film 58 formed at the delivery part 211 is brought into contact with a surface of the substrate P to form a reservoir. Subsequently, formation of the coating film is carried out by delivering the coating liquid from the nozzle delivery part 211 while the nozzle 21 is horizontally moved in a coating direction X.


Inventors:
KAMIYAMA TSUTOMU
Application Number:
JP2002378857A
Publication Date:
July 29, 2004
Filing Date:
December 27, 2002
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
G03F7/16; B05C5/02; B05C11/08; B05C11/10; B05D1/26; B05D1/40; G09F9/00; H01L21/027; (IPC1-7): B05C5/02; B05C11/10; B05D1/26; G03F7/16; G09F9/00; H01L21/027
Attorney, Agent or Firm:
Ryose Uji
Kakusho Shoichi