Title:
表面検査装置
Document Type and Number:
Japanese Patent JP4635939
Kind Code:
B2
More Like This:
| JP2015172585 | INSPECTION SYSTEM |
| JPS564040 | INSPECTION METHOD FOR DEFECT ON SURFACE OF OBJECT |
Inventors:
Takeo Omori
Application Number:
JP2006094146A
Publication Date:
February 23, 2011
Filing Date:
March 30, 2006
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01N21/956; G01B11/24; H01L21/027
Domestic Patent References:
| JP2000338049A | ||||
| JP62019739A | ||||
| JP2000081505A | ||||
| JP2001085322A | ||||
| JP2005268359A | ||||
| JP52040348A | ||||
| JP2006343102A | ||||
| JP2006266817A | ||||
| JP2002116011A | ||||
| JP2000155099A |
Foreign References:
| WO2005040776A1 |
Attorney, Agent or Firm:
Furuya Fumio