Title:
SYSTEM AND METHOD FOR CONTROLLING ION DENSITY AND ENERGY USING MODULATED POWER SIGNAL
Document Type and Number:
Japanese Patent JP2007016314
Kind Code:
A
Abstract:
To provide a method for controlling ion density and sputtering rate in a sputtering system.
In one embodiment, a first pulse-width power signal is applied to the cathode to thereby generate a higher concentration of ions. The pulse-width of the first pulse-width power signal is then decreased to thereby increase the sputtering rate and decrease the ion density around the cathode. Next, the process is repeated to create a modulated signal. The ion density and ions energy in a sputtering system are controlled using the modulated signal.
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Inventors:
STOWELL MICHAEL W
Application Number:
JP2006165141A
Publication Date:
January 25, 2007
Filing Date:
June 14, 2006
Export Citation:
Assignee:
APPLIED FILMS CORP
International Classes:
C23C14/34; H05H1/24
Attorney, Agent or Firm:
Yuichi Yamada
Masakazu Noda
Masakazu Noda
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