Title:
流体流れを制御するシステムおよび方法
Document Type and Number:
Japanese Patent JP5314059
Kind Code:
B2
Abstract:
Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.
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Inventors:
Mark Lava Deer
Robert F. Macroglen
Robert F. Macroglen
Application Number:
JP2011004417A
Publication Date:
October 16, 2013
Filing Date:
January 12, 2011
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
H01L21/31; G05D7/00; G05D7/06; G05D11/00
Domestic Patent References:
| JP2000161514A | ||||
| JP10274016A |
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro