【発明の名称】ネガ型感放射線性樹脂組成物

Title:

【発明の名称】ネガ型感放射線性樹脂組成物

Document Type and Number:

Japanese Patent JP3082479

Kind Code:

B2

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Inventors:

Toru Kajita
Eiichi Kobayashi
Toshiyuki Ohta
Akira Tsuji

Application Number:

JP30783692A

Publication Date:

August 28, 2000

Filing Date:

October 23, 1992

Export Citation:

Assignee:

JSR Corporation

International Classes:

G03F7/004; G03F7/038; H01L21/027; (IPC1-7): G03F7/004; G03F7/038; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Toshiaki Fukuzawa

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