Title:
DUST-PROOF CASSETTE
Document Type and Number:
Japanese Patent JPS605520
Kind Code:
A
Abstract:
PURPOSE:To enable to convey cassettes without having manual help as well as to prevent adhesion of dust on the cassettes by a method wherein a fin-like protruded part is provided outside a box member, and a reticle is put in the cassette, wherein a protruded supporting part to be used to detachably support said protruded part, is provided inside the side face of a cover member. CONSTITUTION:A reticle 6 or a mask is placed on the stepped face 4d of a box member 4, and the box member 4 is inserted into the cover member 1 in such a manner that a protruded part 4a will be placed on a supporting part 1a from the entrance end part 1b of the cover member 1. A pawl member 3 is connected to the hooking part 4b of the box member 4 at the position exactly fit to the stopping member 4c of the entrance end part 1b of the cover member and the stop member 4c of the box member 4, and they are engaged in such a manner that the cover member 1 and the box member 4 will not be separated. Said cassette is installed on the device, and the mask and the reticle are automatically carried to the position of exposure from the cassette and installed there, thereby enabling to prevent adhesion of dust coming from the human body to the mask or the reticle.
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Inventors:
IMAI SHIYUNZOU
SATOU HIROSHI
IIZUKA KAZUO
SATOU HIROSHI
IIZUKA KAZUO
Application Number:
JP11292883A
Publication Date:
January 12, 1985
Filing Date:
June 24, 1983
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/30; B65G1/00; B65G1/02; G03B23/02; G03F7/20; H01L21/027; H01L21/67; H01L21/673; H01L21/677; (IPC1-7): H01L21/30; G03F7/20; H01L21/68
Attorney, Agent or Firm:
Wakabayashi Tadashi
Next Patent: JPS605521