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Title:
MEASURING DEVICE FOR FILM THICKNESS
Document Type and Number:
Japanese Patent JPS5930004
Kind Code:
A
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JP4878632Thin film forming apparatus equipped with an optical film thickness meter and an optical film thickness meter
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JPH01131405FILM THICKNESS MEASURING INSTRUMENT
Inventors:
JIYANNKUROODO ANDORE CHIYASUTA
UORUTAA UIRIAMU HIRUDENBURANDO
MENACHIEMU REBUANONI
Application Number:
JP9512183A
Publication Date:
February 17, 1984
Filing Date:
May 31, 1983
Export Citation:
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Assignee:
IBM
International Classes:
G01B11/06; G01N21/21; (IPC1-7): G01B11/06
Domestic Patent References:
JPS5599045A1980-07-28
JPS5017874A1975-02-25
Attorney, Agent or Firm:
Tsukio Okada



 
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