Title:
ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP5562058
Kind Code:
B2
Inventors:
Hiroyasu Kawashima
Atsushi Oyama
Shinichi Sekiguchi
Atsushi Oyama
Shinichi Sekiguchi
Application Number:
JP2010023319A
Publication Date:
July 30, 2014
Filing Date:
February 04, 2010
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04D19/04
Domestic Patent References:
| JP2005042709A | ||||
| JP4059394U | ||||
| JP1267392A |
Attorney, Agent or Firm:
Isamu Watanabe
Ryoji Kosugi
Tetsuya Hirosawa
Ryoji Kosugi
Tetsuya Hirosawa