Title:
ウェハ状基板の分割方法
Document Type and Number:
Japanese Patent JP5775266
Kind Code:
B2
Inventors:
Kenji Takeda
Application Number:
JP2010114042A
Publication Date:
September 09, 2015
Filing Date:
May 18, 2010
Export Citation:
Assignee:
Opt System Co., Ltd.
International Classes:
B23K26/40; B23K26/00; B23K26/046; B23K26/38; B23K26/53; B28D5/00; C03B33/09; H01L21/301
Domestic Patent References:
| JP2008006652A | ||||
| JP2008098465A | ||||
| JP2005193286A | ||||
| JP2008060167A |
Attorney, Agent or Firm:
Seiichi Nonaka
Isabe Tsuyoshi
Isabe Tsuyoshi
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