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Title:
An electric field effect type compound semiconductor device and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6240460
Kind Code:
B2
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Inventors:
Kenji Kiuchi
Tsutomu Hosoda
Application Number:
JP2013206961A
Publication Date:
November 29, 2017
Filing Date:
October 02, 2013
Export Citation:
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Assignee:
Transform Japan Co., Ltd.
International Classes:
H01L21/338; H01L21/28; H01L21/318; H01L21/336; H01L29/06; H01L29/423; H01L29/49; H01L29/778; H01L29/78; H01L29/812
Domestic Patent References:
JP2013026442A
JP2010118556A
JP7302804A
JP2011192719A
JP2012069978A
JP2013077620A
JP2013077621A
JP2008306027A
JP2010245240A
JP2013120871A
JP2013503483A
JP2013058774A
JP2010238838A
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Takahiro Kobuki



 
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