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Title:
An electromagnetic wave detector and an electromagnetic wave detector array
Document Type and Number:
Japanese Patent JP6073530
Kind Code:
B2
Abstract:
An electromagnetic wave detector includes: a substrate; an insulating layer provided on the substrate; a graphene layer provided on the insulating layer; a pair of electrodes provided on the insulating layer, with the graphene layer being interposed therebetween; and buffer layers interposed between the graphene layer and the electrodes to separate the graphene layer and the electrodes from each other. The electromagnetic wave detector array includes arrayed electromagnetic wave detectors that are the same as or different from each other.

Inventors:
Shinpei Ogawa
Daisuke Fujisawa
Shimatani Masaaki
Application Number:
JP2016532011A
Publication Date:
February 01, 2017
Filing Date:
January 04, 2016
Export Citation:
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Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L31/08; G01J1/02; H01L27/144; H01L27/146; H01L31/10
Domestic Patent References:
JP2012064784A2012-03-29
JP2013537700A2013-10-03
JP2012019132A2012-01-26
JP2014220488A2014-11-20
JP2012064784A2012-03-29
Foreign References:
US20120227787A12012-09-13
WO2014149004A12014-09-25
US20140264275A12014-09-18
US20140023321A12014-01-23
US20140176186A12014-06-26
US20140319357A12014-10-30
US20120227787A12012-09-13
WO2014149004A12014-09-25
US20140264275A12014-09-18
US20140023321A12014-01-23
US20140176186A12014-06-26
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Haruo Nakano