Title:
A manufacturing method of a polishing pad and a polishing pad
Document Type and Number:
Japanese Patent JP6163415
Kind Code:
B2
Inventors:
Mitsuru Kato
Nobuo Takaoka
Hirofumi Kikuchi
Tomotaka Okamoto
Shinya Kato
Kiyooka Junto
Junichi Taniguchi
Nobuo Takaoka
Hirofumi Kikuchi
Tomotaka Okamoto
Shinya Kato
Kiyooka Junto
Junichi Taniguchi
Application Number:
JP2013244216A
Publication Date:
July 12, 2017
Filing Date:
November 26, 2013
Export Citation:
Assignee:
KURARAY CO.,LTD.
International Classes:
B24B37/24; B24D3/00; B24D11/00; G11B5/84; H01L21/304
Domestic Patent References:
| JP2008207323A | ||||
| JP2007314904A | ||||
| JP2008207325A |
Attorney, Agent or Firm:
Masaru Egawa
Shinichi Kawasaki
Shinichi Kawasaki
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