The method of forming a hole in a crystal base board, and the functional device which has wiring and piping in a crystal base board - National University Corporation Osaka University

Title:

The method of forming a hole in a crystal base board, and the functional device which has wiring and piping in a crystal base board

Document Type and Number:

Japanese Patent JP6028969

Kind Code:

B2

More Like This:

JP2012009737	DRY ETCHING METHOD AND DRY ETCHING APPARATUS
JPH0714832	FORMATION OF MULTILAYER INTERCONNECTION OF SEMICONDUCTOR DEVICE
JPH0869994	PRODUCTION OF SEMICONDUCTOR DEVICE

Inventors:

Matsumura Michio
Daichi Nagata
Koichi Kugimiya

Application Number:

JP2012185715A

Publication Date:

November 24, 2016

Filing Date:

August 24, 2012

Export Citation:

Assignee:

National University Corporation Osaka University

International Classes:

H01L21/302; B81C1/00; H01L21/306

Domestic Patent References:

Foreign References:

Attorney, Agent or Firm:

Harakenzo world patent & trademark

Previous Patent: Anti-influenza virus agent

Next Patent: OLIGO ESTER CONTAINING TETRAHYDROFURAN RING IN MAIN CHAIN