Title:
A pulsed laser apparatus, an exposure device, and an inspection device
Document Type and Number:
Japanese Patent JP6016124
Kind Code:
B2
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Inventors:
Akira Tokuhisa
Application Number:
JP2013104239A
Publication Date:
October 26, 2016
Filing Date:
May 16, 2013
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02F1/37; H01S3/00; H01S3/067; H01S3/10
Domestic Patent References:
| JP2012002965A | ||||
| JP2003502700A |
Foreign References:
| WO2002095486A1 |
Attorney, Agent or Firm:
Takashi Iwasaki
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