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Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/196320
Kind Code:
A1
Abstract:
　An acceleration sensor (11) is provided with a fixed part (12), a weight part (13), a detection beam (14A), support beams (14B, 14C), and a metal wiring (15A). The weight part (13) is supported so as to be able to shift position relative to the fixed part (12). The detection beam (14A) is connected to the fixed part (12) and the weight part (13), and piezoresistive elements (16A-16D) are provided thereto. The support beams (14B, 14C) are provided separately from the detection beam (14A), and are connected to the fixed part (12) and the weight part (13). Both ends of the metal wiring (15A) lead to the fixed part (12), and the metal wiring (15A) is arranged so as to pass through the support beams (14B, 14C).

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JP3876615SEMICONDUCTOR ACCELERATION SENSOR AND INSPECTING METHOD FOR THE SEMICONDUCTOR ACCELERATION SENSOR
JPS57637OPTICAL DEVICE
JPH10160750SERVO-TYPE ACCELEROMETER
Inventors:
HAMAMURA HIROSHI (JP)
Application Number:
PCT/JP2014/062768
Publication Date:
December 11, 2014
Filing Date:
May 14, 2014
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01P21/00; B81B3/00; G01P15/12; H01L29/84
Foreign References:
JPH10123167A1998-05-15
JPH09304426A1997-11-28
JPH07325105A1995-12-12
JPH0743381A1995-02-14
JPH0593738A1993-04-16
JPH0413975A1992-01-17
JPH01163673A1989-06-27
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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