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Title:
CERAMIC ASSEMBLY AND ELECTROSTATIC CHUCK DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/145090
Kind Code:
A1
Abstract:
A ceramic assembly 1 comprises a pair of ceramic plates 2, 3, and an electrode layer 4 and an insulating layer 5 which are interposed between the pair of ceramic plates 2, 3, wherein the insulating layer 5 is composed of an insulating material and a conductive material.

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Inventors:
ARIKAWA JUN (JP)
HIDAKA NOBUHIRO (JP)
MIURA YUKIO (JP)
Application Number:
PCT/JP2021/031890
Publication Date:
July 07, 2022
Filing Date:
August 31, 2021
Export Citation:
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Assignee:
SUMITOMO OSAKA CEMENT CO LTD (JP)
International Classes:
H02N13/00; C04B37/00; H01L21/683
Foreign References:
JP2011176275A2011-09-08
JP2020040865A2020-03-19
JP2016201411A2016-12-01
JP2002261157A2002-09-13
JP2021040110A2021-03-11
JP2003124299A2003-04-25
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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