Title:
COATING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2021/109425
Kind Code:
A1
Abstract:
Provided by the present invention is a coating equipment. The coating equipment comprises a reaction cavity body, a gas supply part, a vacuum pumping apparatus, a pulse power supply and a radio frequency power supply, wherein the reaction cavity body has a reaction cavity, the gas supply part is used to supply gas to the reaction cavity, the vacuum pumping apparatus is connected to the reaction cavity body in a manner capable of communication with the reaction cavity, the pulse power supply is used to provide the reaction cavity body with a pulsed electric field, and the radio frequency power supply is used to provide the reaction cavity body with a radio frequency electric field. A plurality of coated workpieces are held in the reaction cavity, and when the pulse power supply and the radio frequency power supply are connected, the gas in the reaction cavity body is ionized under the action of the radio frequency electric field and the pulsed electric field to generate plasma, and the plasma is deposited to the surface of workpieces to be coated.
Inventors:
ZONG JIAN (CN)
LAN ZHUYAO (CN)
SHAN WEI (CN)
HAN HUI (CN)
LAN ZHUYAO (CN)
SHAN WEI (CN)
HAN HUI (CN)
Application Number:
PCT/CN2020/086526
Publication Date:
June 10, 2021
Filing Date:
April 24, 2020
Export Citation:
Assignee:
JIANGSU FAVORED NANOTECHNOLOGY CO LTD (CN)
International Classes:
C23C16/505; C23C16/26; C23C16/455; C23C16/458; C23C16/515
Domestic Patent References:
| WO2011099205A1 | 2011-08-18 |
Foreign References:
| CN111020534A | 2020-04-17 | |||
| CN206948696U | 2018-01-30 | |||
| US7993462B2 | 2011-08-09 | |||
| CN102804932A | 2012-11-28 | |||
| CN207727149U | 2018-08-14 | |||
| CN203411606U | 2014-01-29 |
Other References:
See also references of EP 4071269A4
Attorney, Agent or Firm:
NINGBO RAYMOND IP AGENCY FIRM (CN)
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