Title:
CRYSTAL, MULTILAYER STRUCTURE, ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS AND SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/048765
Kind Code:
A1
Abstract:
[Problem] The present invention provides: a crystal which has excellent crystallinity; a multilayer structure; and an element, an electronic device, an electronic apparatus and a system, each of which uses the crystal and the multilayer structure. [Solution] When a multilayer structure is produced by forming at least a compound film on a crystal substrate and subsequently superposing a crystal film, which contains a crystal that is formed of a crystalline metal compound that contains, as a main component, a metal compound containing a compound of Hf, Zr and Ce, on the compound film, the superposition is carried out by forming the crystal film using the compound elements in the compound film.
Inventors:
KIJIMA TAKESHI (JP)
Application Number:
PCT/JP2023/032024
Publication Date:
March 07, 2024
Filing Date:
August 31, 2023
Export Citation:
Assignee:
GAIANIXX INC (JP)
International Classes:
C23C14/08; H01L29/12; H01L29/739; H01L29/78; H10N30/076; H10N30/079; H10N30/853
Foreign References:
| JP2019216181A | 2019-12-19 | |||
| JP2018070437A | 2018-05-10 | |||
| JP2004006960A | 2004-01-08 |
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