Title:
ELECTROLYZED WATER SUPPLYING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/037839
Kind Code:
A1
Abstract:
According to an aspect of the present invention, with respect to an electrolyzing tank that uses pure water to produce acidic water or alkaline water, and to an electrolyzed water supplying system for supplying the acidic water or the alkaline water produced in the electrolyzing tank to a semiconductor manufacturing process, an electrolyzed water supplying system is provided which comprises: an electrolyzing tank configured to include an alkaline water producing chamber and an acidic water producing chamber having flow paths formed by means of a plurality of partitioning walls and passages; a supply line for supplying the alkaline water produced in the alkaline water producing chamber and the acidic water produced in the acidic water producing chamber directly to a semiconductor manufacturing process; and flow adjusting means installed respectively on flow lines respectively connecting the alkaline water producing chamber and the acidic water producing chamber of the electrolyzing tank, and the supply lines to one another.
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Inventors:
AHN JONG HO (KR)
KIM BOK SOO (KR)
PARK SEONG HWAN (KR)
BAE JUNG WAN (KR)
KIM BOK SOO (KR)
PARK SEONG HWAN (KR)
BAE JUNG WAN (KR)
Application Number:
PCT/KR2014/007886
Publication Date:
March 19, 2015
Filing Date:
August 25, 2014
Export Citation:
Assignee:
SOULBRAIN NANO TECH INC (KR)
International Classes:
H01L21/302; H01L21/02
Foreign References:
| KR19980081448A | 1998-11-25 | |||
| KR100276766B1 | 2001-04-02 | |||
| KR100210884B1 | 1999-07-15 |
Attorney, Agent or Firm:
ROH, CHUL HO (KR)
노철호 (KR)
노철호 (KR)
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