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Title:
EVALUATION METHOD FOR RESIST POLYMER
Document Type and Number:
WIPO Patent Application WO/2022/210319
Kind Code:
A1
Abstract:
[Problem] To provide a method that does not require complicated steps, is simple, and makes it possible to evaluate, with high sensitivity, the dissolution characteristics of a resist polymer. [Solution] This evaluation method for the dissolution characteristics of a resist polymer comprises the following steps (i) to (iii): (i) a step for preparing a test solution by dissolving the resist polymer in a solvent; (ii) a step for dripping the solvent while stirring the test solution and measuring, in real time, the dripping weight of the solvent and a change in the turbidity of the test solution at that time; and (iii) a step for calculating the dripping amount of the solvent until the turbidity of the test solution reaches a prescribed value.

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Inventors:
TABATA DAISUKE (JP)
TSUKAMOTO TATSUYA (JP)
FURUYA YOSHIYUKI (JP)
SATO RYO (JP)
Application Number:
PCT/JP2022/014229
Publication Date:
October 06, 2022
Filing Date:
March 25, 2022
Export Citation:
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Assignee:
MARUZEN PETROCHEM CO LTD (JP)
International Classes:
G03F7/16; G01N21/59; G01N33/00; G03F7/26
Foreign References:
JP2012068471A2012-04-05
JP2005091407A2005-04-07
JP2011048354A2011-03-10
JP2012068471A2012-04-05
JP2013214032A2013-10-17
Attorney, Agent or Firm:
NAKAMURA Yukitaka et al. (JP)
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