FILM-FORMING DEVICE - MITSUBISHI HEAVY IND FOOD & PACKAGING MACHINERY CO LTD

Title:

FILM-FORMING DEVICE

Document Type and Number:

WIPO Patent Application WO/2017/056133

Kind Code:

A1

Abstract:

The purpose of the present invention is to provide a film-forming device capable of preventing oxidation of a heat generating body at the time of forming a gas barrier film by means of a catalytic chemical vapor deposition (Cat-CVD) method. In a film-forming device 1 of the present invention, a gas supply tube 20 is provided with: a first supply tube 21, which advances and retracts in a film-forming chamber 11, has a first gas flow channel 26 inside, and discharges a medium gas G toward a heat generating body 31 from a leading end; and a second supply tube 23, which has inside a second gas flow channel 27 in communication with the first gas flow channel 26, and which is connected to the first supply tube 21. The film-forming device 1 is provided with: a first cylinder 41, in which the first supply tube 21 ascends and descends, and which has a depressurization chamber 43 in communication with the first gas flow channel 26; and a second cylinder 45, in which the second supply tube 23 ascends and descends, and which has a storage chamber 47 in communication with the second gas flow channel 27. The medium gas G supplied to the storage chamber 47 passes through the second supply tube 23 and the first supply tube 21 in this order, and is supplied to a container P.

Inventors:

MIZUKAWA KENJI (JP)
HIROYA KIYOSHI (JP)
NAKANISHI FUMIKAZU (JP)

Application Number:

PCT/JP2015/005018

Publication Date:

April 06, 2017

Filing Date:

October 01, 2015

Export Citation:

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Assignee:

MITSUBISHI HEAVY IND FOOD & PACKAGING MACHINERY CO LTD (JP)

International Classes:

C23C16/455; B65D23/02

Domestic Patent References:

WO2013099960A1

2013-07-04

Foreign References:

JP2013133494A	2013-07-08
JP2013534565A	2013-09-05

Other References: