Title:
FLEXIBLE SENSOR, AND METHOD FOR MANUFACTURING FLEXIBLE SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/145220
Kind Code:
A1
Abstract:
A flexible sensor (10) comprises: a flexible main substrate (21); a support substrate (28) that is flexible, is formed from a material of which at least an outer surface is electrically insulating, and is provided on the main substrate (21); and a variable resistance portion (24) which has a resistance value that changes in accordance with distortion thereof, and which is provided on a first surface (28a) on the opposite side of the support substrate (28) to the main substrate (21).
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| WO/2011/064144 | BEARING DEVICE HAVING A SENSOR FOR MEASURING THE VERTICAL BEARING FORCE OF A ROTATING SHAFT |
| WO/2014/059833 | PRESSURE SENSOR |
Inventors:
KANAZAWA SHUSUKE (JP)
ITAGAKI MOTOSHI (JP)
KOIZUMI SHOHEI (JP)
KITO YOSHIAKI (JP)
HATAYAMA KATSUHIRO (JP)
SHIM CHANGHOON (JP)
ITAGAKI MOTOSHI (JP)
KOIZUMI SHOHEI (JP)
KITO YOSHIAKI (JP)
HATAYAMA KATSUHIRO (JP)
SHIM CHANGHOON (JP)
Application Number:
PCT/JP2022/043157
Publication Date:
August 03, 2023
Filing Date:
November 22, 2022
Export Citation:
Assignee:
AIST (JP)
NIKON CORP (JP)
NIKON CORP (JP)
International Classes:
G01L1/18; G01L5/00
Foreign References:
| JP2020085613A | 2020-06-04 | |||
| JP2016121974A | 2016-07-07 | |||
| JP2021117032A | 2021-08-10 | |||
| CN111883556A | 2020-11-03 | |||
| US20180247994A1 | 2018-08-30 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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