Title:
FLUID CONTROL SYSTEM AND VALVE MODULE
Document Type and Number:
WIPO Patent Application WO/2023/281871
Kind Code:
A1
Abstract:
In order to achieve a dramatic downsizing of a fluid control system, there are provided a mass flow controller MFC, a pair of blocks 10, 20 that is bridged by the mass flow controller MFC and in which an internal flow path is formed, and a valve 50 that is attached to one of the pair of blocks 10, 20 and arranged on the inner flow path, wherein the valve 50 is attached to an opposing surface 11 of one block 10 that faces the other block 20 and arranged in a space bounded by the opposing surface 11 and a bottom surface BS of the mass flow controller MFC.
Inventors:
KIMURA MIYOSHI (JP)
Application Number:
PCT/JP2022/015335
Publication Date:
January 12, 2023
Filing Date:
March 29, 2022
Export Citation:
Assignee:
IHARA SCIENCE CORP (JP)
International Classes:
F16K27/00; F16K35/02
Domestic Patent References:
| WO2007141828A1 | 2007-12-13 |
Foreign References:
| JP2006132598A | 2006-05-25 | |||
| JP2016003752A | 2016-01-12 | |||
| JP2006319190A | 2006-11-24 | |||
| JP2006234110A | 2006-09-07 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei et al. (JP)
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