Title:
FLUORESCENT X-RAY ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/091597
Kind Code:
A1
Abstract:
A fluorescent X-ray analysis device according to the present invention is provided with: a determining means (21) for determining, for all measurement rays, which are secondary X-rays of which the intensity is to be measured, whether the ratio of a logical intensity in a thin film, calculated on the basis of an assumed thickness and the known content of each component, to the logical intensity in bulk, calculated on the basis of the known content of each component, exceeds a predetermined threshold; and a saturation thickness quantifying means (23) for, if the determining means (21) has determined that the ratio of the logical intensities exceeds the predetermined threshold for all the measurement rays, calculating a saturation thickness at which the logical intensity is saturated, on the basis of the known content of each component, for each measurement ray, and taking the greatest saturation thickness as the quantitative value of the thickness.
Inventors:
HARA SHINYA (JP)
YAMADA YASUJIRO (JP)
HOMMA HISASHI (JP)
YAMADA YASUJIRO (JP)
HOMMA HISASHI (JP)
Application Number:
PCT/JP2021/033363
Publication Date:
May 05, 2022
Filing Date:
September 10, 2021
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/223
Domestic Patent References:
| WO2017026200A1 | 2017-02-16 |
Foreign References:
| JP2004004102A | 2004-01-08 | |||
| JPH04118509A | 1992-04-20 | |||
| JP2008057977A | 2008-03-13 | |||
| JPH10221047A | 1998-08-21 | |||
| US8515009B1 | 2013-08-20 | |||
| CN110530912A | 2019-12-03 |
Other References:
See also references of EP 4063841A4
Attorney, Agent or Firm:
SUGIMOTO, Shuji et al. (JP)
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