Title:
ION GENERATION APPARATUS AND ION IMPLANTATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/058291
Kind Code:
A1
Abstract:
An ion generation apparatus 10 comprises: an arc chamber 50; a magnetic field generator 52 that generates a magnetic field B to be applied in the axial direction in an internal space S of the arc chamber 50; a first cathode cap 72 that protrudes toward the inside of the arc chamber 50 in the axial direction and emits thermal electrons toward the internal space S; and a first thermal shield 76 that includes a first extension portion which axially extends in a tubular shape on the radially outer side of the first cathode cap 72 and which is adjacent to the first cathode cap 72 with a gap interposed therebetween in the radial direction perpendicular to the axial direction, a first tip portion that protrudes toward the inside of the arc chamber, and a first tip opening that opens in the axial direction in the first tip portion. The first tip opening has a first opening width in the radial direction smaller than the maximum width of the first cathode cap 72 in the radial direction.
Inventors:
KAWATSU SHO (JP)
SATO MASATERU (JP)
SATO MASATERU (JP)
Application Number:
PCT/JP2022/027548
Publication Date:
April 13, 2023
Filing Date:
July 13, 2022
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD (JP)
International Classes:
H01J27/14; H01J37/08; H01J37/317
Foreign References:
| JP2016225139A | 2016-12-28 | |||
| JP2015225720A | 2015-12-14 | |||
| JP2010073387A | 2010-04-02 | |||
| JPH07161323A | 1995-06-23 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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