Title:
LIGHT SOURCE DEVICE FOR EXPOSURE, LIGHTING DEVICE, EXPOSURE DEVICE, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2021/251090
Kind Code:
A1
Abstract:
This light source device for exposure is provided with a first LED array (71) which comprises multiple first LED elements (72) which emit exposure light, a second LED array (75) which has multiple second LED elements (76) which emit alignment light, and a dichroic film (81) which transmits light in a prescribed wavelength band and reflects light in other wavelength bands, wherein said dichroic film (81) is provided with a dichroic mirror (80) which is arranged inclined relative to an optical axis direction L common to the first and the second LED elements (72, 76), and a fly-eye lens (65) into which light of the first LED elements (72) or the second LED elements (76) is incident through the dichroic mirror (80). In the common optical axis direction L, the first LED array (71) is arranged on the side of the dichroic mirror (80) opposite of the fly-eye lens (65), and the second LED array (75) is arranged to the side of the dichroic mirror (70), intersecting the common optical axis direction L. By this means, alignment can be adjusted with high accuracy even when using LEDs as a light source and thus, exposure accuracy can be improved greatly.
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Inventors:
YABE SHUNICHI (JP)
ENOMOTO YOSHIYUKI (JP)
ENOMOTO YOSHIYUKI (JP)
Application Number:
PCT/JP2021/019077
Publication Date:
December 16, 2021
Filing Date:
May 19, 2021
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
G02B19/00; G02B5/04; G02B5/08; G03F7/20
Domestic Patent References:
| WO2017209132A1 | 2017-12-07 | |||
| WO2019155886A1 | 2019-08-15 |
Foreign References:
| JP2012080004A | 2012-04-19 | |||
| JP2019078883A | 2019-05-23 | |||
| JP2012063390A | 2012-03-29 | |||
| JPH1070064A | 1998-03-10 |
Attorney, Agent or Firm:
EIKOH PATENT FIRM, P.C. (JP)
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