Title:
MASS TRANSFER APPARATUS AND METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/046684
Kind Code:
A1
Abstract:
A mass transfer apparatus and a method therefor. The mass transfer apparatus comprises: a base (10), alignment grooves (11) disposed on the base (10) and used for placing micro-elements, and nanostructures (12) disposed on the base (10). The alignment grooves (11) and the nanostructures (12) are located on the same side of the base (10). By disposing the nanostructures (12) on the base (10), the friction force between the micro-elements and the base (10) is reduced, which may help the sliding of the micro-elements and improve the alignment efficiency, thereby increasing the transfer efficiency.
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Inventors:
HONG WENZHEN (CN)
XU SHIYUAN (CN)
XU SHIYUAN (CN)
Application Number:
PCT/CN2019/104944
Publication Date:
March 18, 2021
Filing Date:
September 09, 2019
Export Citation:
Assignee:
CHONGQING KONKA PHOTOELECTRIC TECH RESEARCH INSTITUTE CO LTD (CN)
International Classes:
H01L21/67; B82B1/00; H01L27/15
Foreign References:
| CN107910413A | 2018-04-13 | |||
| CN102790152A | 2012-11-21 | |||
| CN102259831A | 2011-11-30 | |||
| CN208000901U | 2018-10-23 | |||
| CN109950182A | 2019-06-28 | |||
| CN110047785A | 2019-07-23 | |||
| DE202012102039U1 | 2013-02-08 |
Attorney, Agent or Firm:
JOHNSON INTELLECTUAL PROPERTY AGENCY (SHENZHEN) (CN)
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