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Title:
METHOD AND APPARATUS FOR EMBEDDED PROCESS CONTROL FRAMEWORK IN TOOL SYSTEMS
Document Type and Number:
WIPO Patent Application WO2002035300
Kind Code:
A3
Abstract:
A method and an apparatus for implementing an embedded process control into a manufacturing tool (110, 112) system (210, 220, 230). At least one semiconductor device is processed. An embedded process control procedure is performed in response to the processing of the semiconductor device. A subsequent process of semiconductor device is performed in response to the embedded process control procedure. The apparatus of the present invention comprises: a computer system (130); and at least one manufacturing tool (110, 112) system (210, 220, 230) interfaced with the computer, the manufacturing tool (110, 220, 230) comprising an embedded process control system capable of receiving commands from the computer system (130) and control a manufacturing process performed by the manufacturing tool (110, 112) system (210, 220, 230).

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Inventors:
TOPRAC ANTHONY J
COSS ELFIDO JR
Application Number:
PCT/US2001/025655
Publication Date:
January 16, 2003
Filing Date:
August 16, 2001
Export Citation:
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Assignee:
ADVANCED MICRO DEVICES INC (US)
International Classes:
H01L21/205; G05B19/418; H01L21/02; H01L21/66; (IPC1-7): G05B19/418
Domestic Patent References:
WO2001097279A22001-12-20
WO2002009170A22002-01-31
WO2000072090A22000-11-30
WO1997012300A11997-04-03
Foreign References:
US5440478A1995-08-08
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