Title:
METHOD FOR MANUFACTURING DISCHARGE DEVICE, AND DISCHARGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/199504
Kind Code:
A1
Abstract:
The present invention includes a step for injecting a solution (3) for forming an electroconductive film (4) into the interior of a dielectric tube (2), of which one end is sealed, and forming an electroconductive film (4) on the inner surface of the dielectric tube (2), as a result of which a fine electroconductive film (4) is formed. The present invention furthermore includes a step for inserting a cylindrical electric power supply part (11) along the inner surface of the dielectric tube (2) and forming the electroconductive film (4) between the electric power supply part (11) and the inner surface of the dielectric tube (2), as a result of which formation of the electroconductive film (4) and connection of the electric power supply part (11) to the electroconductive film (4) are performed simultaneously, and manufacturing is performed using a simple process at low cost and with high quality.
More Like This:
JP2020017419 | PLASMA GENERATOR |
WO/2013/031777 | ION SOURCE |
JP7022773 | A device that generates extreme ultraviolet light |
Inventors:
SHIOTA ARUFA (JP)
KUZUMOTO MASAKI (JP)
OINUMA GAKU (JP)
NAGAI HIROKI (JP)
SATO MITSUNOBU (JP)
KUZUMOTO MASAKI (JP)
OINUMA GAKU (JP)
NAGAI HIROKI (JP)
SATO MITSUNOBU (JP)
Application Number:
PCT/JP2022/017910
Publication Date:
October 19, 2023
Filing Date:
April 15, 2022
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
UNIV KOGAKUIN (JP)
UNIV KOGAKUIN (JP)
International Classes:
H05H1/24
Domestic Patent References:
WO2006103945A1 | 2006-10-05 |
Foreign References:
JPH11500705A | 1999-01-19 | |||
JPS61266304A | 1986-11-26 | |||
JPH072501A | 1995-01-06 |
Attorney, Agent or Firm:
PALMO PATENT FIRM, P.C. (JP)
Download PDF: