METHOD FOR RESUMING PRODUCTION USING SPUTTERING DEVICE

WIPO Patent Application WO/2011/155100

A1

Provided is a low running cost method for resuming production using a sputtering device, with which the time from completion of maintenance work to production resumption can be made as short as possible. The method comprises: a pre-heating step of, while opening the vacuum chamber of a sputtering device to the atmosphere, pre-heating this vacuum chamber to a first temperature (T1) higher than a room temperature (T0); a baking step of tightly closing the vacuum chamber and, while vacuuming the inside of the vacuum chamber, baking the vacuum chamber and a target placed in the vacuum chamber by increasing the temperatures thereof to a second temperature (T2) higher than the first temperature (T1); a determination step of, during the baking step in which the second temperature (T2) is maintained, monitoring the pressure in the vacuum chamber and determining a time point at which this pressure changes from increasing to decreasing; and a cooling step of, immediately after determining, in the determination step, the time point at which the pressure in the vacuum chamber changes from increasing to decreasing, terminating the baking of the vacuum chamber and forcibly cooling at least the vacuum chamber down to a predetermined temperature.

JPS5880877	SOLAR BATTERY AND MANUFACTURE THEREOF
JPH07316810	SPUTTERING DEVICE
JP2020161280	FUEL CELL

MATSUTAKE TAKAYUKI (JP)
MATAGA HIDEKI (JP)
SATOU TOMOHIRO (JP)

PCT/JP2011/000603

December 15, 2011

February 03, 2011

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ULVAC INC (JP)
MATSUTAKE TAKAYUKI (JP)
MATAGA HIDEKI (JP)
SATOU TOMOHIRO (JP)

C23C14/00; C23C14/34

JP2000038668A	2000-02-08
JPH03236237A	1991-10-22
JP2010084211A	2010-04-15

SEIGA PATENT AND TRADEMARK CORPORATION (JP)
SEIGA Patent and Trademark Corporation (JP)

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