Title:
METHOD FOR SYNTHESIS OF HYPERBRANCHED POLYMER, HYPERBRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND METHOD FOR PRODUCTION OF SEMICONDUCTOR INTEGRATED CIRCUIT
Document Type and Number:
WIPO Patent Application WO/2008/078660
Kind Code:
A1
Abstract:
The object is to produce a hyperbranched polymer having a desired molecular weight while
keeping a high degree of branching in a stable manner. In the synthesis of a hyperbranched
polymer by the living radical polymerization of a monomer in the presence of a
metal catalyst, at least one of the following steps (1) and (2) is conducted: (1)
at least one compound represented by R1-A or R2-B-R3 is added [wherein R1 represents
a hydrogen, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to
10 carbon atoms, or an aralkyl group having 7 to 10 carbon atoms; A represents a
cyano group, a hydroxy group, or a nitro group; R2 and R3 independently represent
a hydrogen, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to
10 carbon atoms, an aralkyl group having 7 to 10 carbon atoms, or a dialkylamino group
having 2 to 10 carbon atoms; and B represents a carbonyl group or a sulfonyl group];
and (2) the amount of the monomer added to a reaction system per one divided portion
is less than the total amount of the monomer to be added to the reaction system.
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Inventors:
TANAKA YUKO (JP)
UNO AKINORI (JP)
KABASHIMA SHINICHIRO (JP)
TAMURA MINORU (JP)
KUBO YOSHIYASU (JP)
SASAKI YUSUKE (JP)
HORIBE MINEKO (JP)
KANEKO YUKIHIRO (JP)
SUZUKI KAORU (JP)
UNO AKINORI (JP)
KABASHIMA SHINICHIRO (JP)
TAMURA MINORU (JP)
KUBO YOSHIYASU (JP)
SASAKI YUSUKE (JP)
HORIBE MINEKO (JP)
KANEKO YUKIHIRO (JP)
SUZUKI KAORU (JP)
Application Number:
PCT/JP2007/074579
Publication Date:
July 03, 2008
Filing Date:
December 20, 2007
Export Citation:
Assignee:
LION CORP (JP)
TANAKA YUKO (JP)
UNO AKINORI (JP)
KABASHIMA SHINICHIRO (JP)
TAMURA MINORU (JP)
KUBO YOSHIYASU (JP)
SASAKI YUSUKE (JP)
HORIBE MINEKO (JP)
KANEKO YUKIHIRO (JP)
SUZUKI KAORU (JP)
TANAKA YUKO (JP)
UNO AKINORI (JP)
KABASHIMA SHINICHIRO (JP)
TAMURA MINORU (JP)
KUBO YOSHIYASU (JP)
SASAKI YUSUKE (JP)
HORIBE MINEKO (JP)
KANEKO YUKIHIRO (JP)
SUZUKI KAORU (JP)
International Classes:
C08G61/02; B82B3/00; G03F7/039; H01L21/027
Domestic Patent References:
| WO2005061566A1 | 2005-07-07 | |||
| WO2007020734A1 | 2007-02-22 |
Foreign References:
| JPH11269216A | 1999-10-05 | |||
| JP2007154181A | 2007-06-21 | |||
| JP2007231170A | 2007-09-13 | |||
| JP2007211049A | 2007-08-23 | |||
| JP2007206537A | 2007-08-16 |
Other References:
JOURNAL OF POLYMER SCIENCE: PART A: POLYMER CHEMISTRY, vol. 36, 1998, pages 955 - 970
MACROMOLECULES, vol. 29, 1996, pages 1079 - 1081
POLYMER BULLETIN, vol. 55, 2005, pages 181 - 189
MACROMOLECULES, vol. 29, 1996, pages 1079 - 1081
POLYMER BULLETIN, vol. 55, 2005, pages 181 - 189
Attorney, Agent or Firm:
SAKAI, Akinori (20F Kasumigaseki Building,2-5, Kasumigaseki 3-chom, Chiyoda-ku Tokyo 20, JP)
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