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Title:
OXIDE SINTERED BODY, SPUTTERING TARGET, AND METHOD FOR PRODUCING SPUTTERING TARGET
Document Type and Number:
WIPO Patent Application WO/2020/170950
Kind Code:
A1
Abstract:
An oxide sintered body which has a surface having surface roughness Rz of less than 2.0 μm.

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Inventors:
KAIJO AKIRA (JP)
Application Number:
PCT/JP2020/005667
Publication Date:
August 27, 2020
Filing Date:
February 13, 2020
Export Citation:
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Assignee:
IDEMITSU KOSAN COLTD (JP)
International Classes:
C23C14/34; B24B7/22; C04B35/453
Domestic Patent References:
WO2017122618A12017-07-20
WO2007026783A12007-03-08
WO2007034749A12007-03-29
Foreign References:
JP2001316808A2001-11-16
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
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