Title:
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2021/060180
Kind Code:
A1
Abstract:
A part for a plasma processing apparatus that is configured of a ceramic tubular body mainly composed of a rare earth element oxide, aluminum oxide or a rare earth element aluminum composite oxide and that has a through hole in the axial direction, wherein the number of recesses with a depth of 10-20 μm (inclusive) that start from a ridgeline between the inner peripheral surface of the tubular body and an observation target surface obtained by polishing from the outer peripheral surface of the tubular body toward the axis is 2 or less per 1 mm of the ridgeline length.
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Inventors:
TANAKA MANPEI (JP)
Application Number:
PCT/JP2020/035434
Publication Date:
April 01, 2021
Filing Date:
September 18, 2020
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
C04B35/10; C04B35/505; C23C16/44; C23C16/50; H01L21/3065
Domestic Patent References:
| WO2019022244A1 | 2019-01-31 | |||
| WO2015115624A1 | 2015-08-06 |
Foreign References:
| JP2008208000A | 2008-09-11 | |||
| JPH1050677A | 1998-02-20 |
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
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