PARTICLE BEAM SYSTEM COMPRISING A MIRROR CORRECTOR

WIPO Patent Application WO2002067286

A3

The invention relates to a particle beam system comprising a particle source (1), a mirror corrector (9, 21-25), and an objective (16). The mirror corrector comprises an electrostatic mirror (9) and a magnetic beam deflector (21, 22, 23, 24, 25), which is arranged between the particle source (1) and the electrostatic mirror (9) as well as between the electrostatic mirror (9) and the objective (16). The magnetic beam deflector (21, 22, 23, 24, 25) is free from dispersions for each single pass. The magnetic beam deflector (21, 22, 23, 24, 25) also comprises quadrupoles and/or quadrupole components, which are provided in such a manner that a maximum of two planes, which are conjugated with regard to the diffraction plane (28) of the objective (16), occur on the entire path length between the first outlet from the magnetic beam deflector (21, 22, 23, 24, 25) and from the objective (16).

ROSE HARALD (DE)
PREIKSZAS DIRK (DE)
HARTEL PETER (DE)

PCT/EP2002/001553

November 07, 2002

February 14, 2002

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LEO ELEKTRONENMIKROSKOPIE GMBH (DE)
ROSE HARALD (DE)
PREIKSZAS DIRK (DE)
HARTEL PETER (DE)

H01J37/153; H01J37/28; (IPC1-7): H01J37/05; H01J37/28; H01J37/153

EP0530640A1

1993-03-10

ROSE H ET AL: "Time-dependent perturbation formalism for calculating the aberrations of systems with large ray gradients", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, NL, vol. A363, no. 1, 1995, pages 301 - 315, XP004009661, ISSN: 0168-9002

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