Title:
PLASMA TREATMENT DEVICE AND METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2022/177370
Kind Code:
A1
Abstract:
Provided in one embodiment of the present invention is a plasma treatment device comprising: an accommodation unit for accommodating an object to be treated; an exhaust unit connected to the accommodation unit to exhaust the air of a fixed space surrounding the object to be treated; and a treatment unit for forming an electric field for plasma generation in the fixed space from which the air has been exhausted.
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Inventors:
LIM YOU BONG (KR)
KIM JUN YOUNG (KR)
KIM JUN YOUNG (KR)
Application Number:
PCT/KR2022/002460
Publication Date:
August 25, 2022
Filing Date:
February 18, 2022
Export Citation:
Assignee:
PLASMAPP CO LTD (KR)
International Classes:
H01J37/32; A61C8/00; A61C13/02; H05H1/46
Foreign References:
US20180138022A1 | 2018-05-17 | |||
KR20140129279A | 2014-11-06 | |||
KR20190030520A | 2019-03-22 | |||
KR20140044976A | 2014-04-16 | |||
KR20110043018A | 2011-04-27 |
Attorney, Agent or Firm:
THEWAVE IP LAW FIRM (KR)
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