Title:
PROBE PIN AND PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2023/188999
Kind Code:
A1
Abstract:
This probe pin (20) is constituted from a low-resistance member (L) comprising an electroconductive first metal, and a high-resistance member (H) comprising an electroconductive second metal that has a resistivity lower than that of the low-resistance member (L). The probe pin (20) has, between a contact part (20c) and a terminal part (20t), a multiple layer part (T5, T505, T603) constituted in the order of the high-resistance member (H), a slit (S) that is a gap, and the low-resistance member (L), in a first direction (Y) different from a buckling direction in which the probe pin (20) buckles during inspection of an object subject to inspection (W). The low-resistance member (L) and the high-resistance member (H) are disposed so as to not overlap when the multiple layer part (T5, T505, T603) is viewed from the buckling direction (Z).
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Inventors:
OKUMA KOKI (JP)
Application Number:
PCT/JP2023/005990
Publication Date:
October 05, 2023
Filing Date:
February 20, 2023
Export Citation:
Assignee:
JAPAN ELECTRONIC MAT CORPORATION (JP)
International Classes:
G01R1/067; G01R1/073; G01R31/28
Domestic Patent References:
| WO2021122326A1 | 2021-06-24 |
Foreign References:
| JP2018091870A | 2018-06-14 | |||
| JP2013007700A | 2013-01-10 | |||
| CN109425765A | 2019-03-05 | |||
| JP2009272308A | 2009-11-19 | |||
| JP5995953B2 | 2016-09-21 |
Attorney, Agent or Firm:
PALMO PATENT FIRM, P.C. (JP)
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