Title:
A PROBE FOR TESTING AN ELECTRICAL PROPERTY OF A TEST SAMPLE AND AN ASSOCIATED PROXIMITY DETECTOR
Document Type and Number:
WIPO Patent Application WO/2019/096695
Kind Code:
A3
Abstract:
A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.
Inventors:
ØSTERBERG FREDERIK WESTERGAARD (DK)
PETERSEN DIRCH HJORTH (DK)
HENRICHSEN HENRIK HARTMANN (DK)
CAGLIANI ALBERTO (DK)
HANSEN OLE (DK)
NIELSEN PETER FOLMER (DK)
PETERSEN DIRCH HJORTH (DK)
HENRICHSEN HENRIK HARTMANN (DK)
CAGLIANI ALBERTO (DK)
HANSEN OLE (DK)
NIELSEN PETER FOLMER (DK)
Application Number:
PCT/EP2018/080782
Publication Date:
June 20, 2019
Filing Date:
November 15, 2018
Export Citation:
Assignee:
CAPRES AS (DK)
International Classes:
G01R1/067
Foreign References:
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Attorney, Agent or Firm:
BUDDE SCHOU A/S (DK)
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