Title:
SEM IMAGE ACQUISITION DEVICE AND SEM IMAGE ACQUISITION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/056924
Kind Code:
A1
Abstract:
In relation to a scanning electron microscope (SEM) image acquisition device and an SEM image acquisition method, the purpose of the present invention is to scan an electron beam in correspondence with pixels and thereby acquire images and synthesize the same in a case where images of different scanning directions are acquired, and to acquire and synthesize pixel-signal images from the same position on a mask. The present invention is provided with the following: a scanning signal generation means for rotating the scanning direction of an electron beam which is scanned onto a sample, and for generating a scanning signal which is emitted to a position on the sample corresponding to the same region and the same pixels on the sample; a deflecting device that emits an electron beam on the basis of the generated scanning signal; a detection and amplification means for detecting and amplifying the signal from the position on the sample which was irradiated with the electron beam; and an image generating means for generating an image of when the position on the sample corresponding to the same region and the same pixels on the sample is irradiated, such generation carried out on the basis of the detected and amplified signal.
More Like This:
Inventors:
SANTO IZUMI (JP)
Application Number:
PCT/JP2016/076631
Publication Date:
April 06, 2017
Filing Date:
September 09, 2016
Export Citation:
Assignee:
HOLON CO LTD (JP)
International Classes:
H01J37/147; H01J37/22; H01J37/28
Foreign References:
| JP2004271269A | 2004-09-30 | |||
| JP2004163420A | 2004-06-10 | |||
| JP2009243993A | 2009-10-22 |
Attorney, Agent or Firm:
OKADA Morihiro (JP)
Download PDF:
Previous Patent: VEHICLE INTERIOR COMPONENT AND METHOD FOR PRODUCING SAME
Next Patent: PROJECTION LENS AND PROJECTOR
Next Patent: PROJECTION LENS AND PROJECTOR