Title:
SEMICONDUCTOR TESTING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/129372
Kind Code:
A1
Abstract:
A semiconductor testing apparatus is provided with a testing apparatus main body for generating a test pattern to be given to a semiconductor device; a test head which is brought into contact with the semiconductor device to give the test pattern generated by the testing apparatus main body to the semiconductor device; a cable for transmitting the test pattern to the test head from the testing apparatus main body; a holding table for movably holding the test head; and a movable supporting section, which holds the cable, moves in a direction for releasing a tensile force closer to the test head side than the testing apparatus main body side when the tensile force is generated to the cable due to movement of the test head from the holding table, and moves the cable closer to the test head side than the testing apparatus main body side in a pulling direction when the cable is loosened due to movement of the test head from the holding table.
Inventors:
SHIBATA HAJIME (JP)
Application Number:
PCT/JP2005/010264
Publication Date:
December 07, 2006
Filing Date:
June 03, 2005
Export Citation:
Assignee:
ADVANTEST CORP (JP)
SHIBATA HAJIME (JP)
SHIBATA HAJIME (JP)
International Classes:
G01R31/28
Foreign References:
| JPH06300819A | 1994-10-28 | |||
| JPH1152022A | 1999-02-26 | |||
| JP2005091041A | 2005-04-07 |
Attorney, Agent or Firm:
Ryuka, Akihiro (22-1 Nishi-Shinjuku 6-chom, Shinjuku-ku Tokyo, JP)
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