Title:
SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/193469
Kind Code:
A1
Abstract:
This sensor has a detection element comprising: an element substrate; a membrane that is provided with an outer surface and an inner surface that is a surface opposite to the outer surface, and that includes a diaphragm part; a side wall member that is provided to the element substrate, and that supports a portion of the inner surface of the membrane towards the outside of the diaphragm part; and a fixed electrode that is provided on the element substrate in a state of being surrounded by the side wall member, that opposes the inner surface of the membrane with a gap therebetween, and that forms a capacitance with the diaphragm part. A first recess part is provided in the outer surface of the membrane between the center of the diaphragm part and the side wall member from the perspective of the thickness direction of the membrane.
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Inventors:
TSUJI DAIKI (JP)
Application Number:
PCT/JP2021/011508
Publication Date:
September 30, 2021
Filing Date:
March 19, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L9/12
Domestic Patent References:
| WO2015076158A1 | 2015-05-28 |
Foreign References:
| US20050241944A1 | 2005-11-03 | |||
| JP2014511775A | 2014-05-19 | |||
| US20100140725A1 | 2010-06-10 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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